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纳米薄膜分析基础(影印版)
  • 书号:9787030222596
    作者:T.L.Alford
  • 外文书名:Fundamentals of Nanoscale Film Analysis
  • 装帧:精装
    开本:B5
  • 页数:356
    字数:731000
    语种:英文
  • 出版社:科学出版社
    出版时间:2008-06
  • 所属分类:法学
  • 定价: ¥68.00元
    售价: ¥53.72元
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  现代科学技术(从材料科学到集成电路)已深入到纳米层次。从薄膜到场效应传感器,研究的重点是如何把尺度从微米量级减小到纳米量级。纳米薄膜分析一书主要研究了材料表面及从表面到几十乃至100纳米深的结构与构成。主要讨论了用入射粒子和光子来量化结构并进行成分和深度分析的材料表征方法。
  本书讨论了通过入射光子或粒子刻蚀纳米材料来表征材料的方法,入射的粒子能够激发出可测的粒子或光子,这正是表征材料的依据,纳米尺度材料分析实验会用到大量入射粒子与待测粒子束的相互作用。其中较重要的有原子碰撞、卢瑟福背散射、离子遂道、衍射、光子吸收、辐射与非辐射阳县跃迁以及核反应。本书详细介绍了各种分析和扫描探针显微技术。
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目录

  • Preface
    1. An Overview:Concepts,Units,and the Bohr Atom
    1.1 Introduction
    1.2 Nomenclature
    1.3 Energies,Units,and Particles
    1.4 Particle-Wave Duality and Lattice Spacing
    1.5 The Bohr Model
    Problems
    2. Atomic Collisions and Backscattering Spectrometry
    2.1 Introduction
    2.2 Kinematics of Elastic Collisions
    2.3 Rutherford Backscattering Spectrometry
    2.4 Scattering Cross Section and Impact Parameter
    2.5 Central Force Scattering
    2.6 Scattering Cross Section:Two-Body
    2.7 Deviations from Rutherford Scattering at Low and High Energy
    2.8 Low-Energy Ion Scattering
    2.9 Forward Recoil Spectrometry
    2.10 Center of Mass to Laboratory Transformation
    Problems
    3. Energy Loss of Light Ions and Backscattering Depth Profiles
    3.1 Introduction
    3.2 General Picture of Energy Loss and Units of Energy Loss
    3.3 Energy Loss of MeV Light Ions in Solids
    3.4 Energy Loss in Compounds Bragg's Rule
    3.5 The Energy Width in Backscattering
    3.6 The Shape of the Backscattering Spectrum
    3.7 Depth Profiles with Rutherford Scattering
    3.8 Depth Resolution and Energy-Loss Straggling
    3.9 Hydrogen and Deuterium Depth Profiles
    3.10 Ranges of H and He Ions
    3.11 Sputtering and Limits to Sensitivity
    3.12 Summary of Scattering Relations
    Problems
    4. Sputter Depth Profiles and Secondary Ion Mass Spectroscopy
    4.1 Introduction
    4.2 Sputtering by Ion Bombardment—General Concepts
    4.3 Nuclear Energy Loss
    4.4 Sputtering Yield
    4.5 Secondary Ion Mass Spectroscopy (SIMS)
    4.6 Secondary Neutral Mass Spectroscopy (SNMS)
    4.7 Preferential Sputtering and Depth Profiles
    4.8 Interface Broadening and Ion Mixing
    4.9 Thomas-Fermi Statistical Model of the Atom
    Problems
    5. Ion Channeling
    5.1 Introduction
    5.2 Channeling in Single Crystals
    5.3 Lattice Location of Impurities in Crystals
    5.4 Channeling Flux Distributions 89
    5.5 Surface Interaction via a Two-Atom Model
    5.6 The Surface Peak
    5.7 Substrate Shadowing:Epitaxial Au on Ag(111)
    5.8 Epitaxial Growth
    5.9 Thin Film Analysis
    Problems
    6. Electron-Electron Interactions and the Depth Sensitivity of Electron Spectroscopies
    6.1 Introduction
    6.2 Electron Spectroscopies:Energy Analysis
    6.3 Escape Depth and Detected Volume
    6.4 Inelastic Electron-Electron Collisions
    6.5 Electron Impact Ionization Cross Section
    6.6 Plasmons
    6.7 The Electron Mean Free Path
    6.8 Influence of Thin Film Morphology on Electron Attenuation
    6.9 Range of Electrons in Solids
    6.10 Electron Energy Loss Spectroscopy (EELS)
    6.11 Bremsstrahlung
    Problems
    7. X-ray Diffraction
    7.1 Introduction
    7.2 Bragg's Law in Real Space
    7.3 Coefficient of Thermal Expansion Measurements
    7.4 Texture Measurements in Polycrystalline Thin Films
    7.5 Strain Measurements in Epitaxial Layers
    7.6 Crystalline Structure
    7.7 Allowed Reflections and Relative Intensities
    Problems
    8. Electron Diffraction
    8.1 Introduction
    8.2 Reciprocal Space
    8.3 Laue Equations
    8.4 Bragg's Law
    8.5 Ewald Sphere Synthesis
    8.6 The Electron Microscope
    8.7 Indexing Diffraction Patterns
    Problems
    9. Photon Absorption in Solids and EXAFS
    9.1 Introduction
    9.2 The Schrodinger Equation
    9.3 Wave Functions
    9.4 Quantum Numbers,Electron Configuration,and Notation
    9.5 Transition Probability
    9.6 Photoelectric Effect Square-Well Approximation
    9.7 Photoelectric Transition Probability for a Hydrogenic Atom
    9.8 X-ray Absorption
    9.9 Extended X-ray Absorption Fine Structure (EXAFS)
    9.10 Time-Dependent Perturbation Theory
    Problems
    10. X-ray Photoelectron Spectroscopy
    10.1 Introduction
    10.2 Experimental Considerations
    10.3 Kinetic Energy of Photoelectrons
    10.4 Photoelectron Energy Spectrum
    10.5 Binding Energy and Final-State Effects
    10.6 Binding Energy Shifts—Chemical Shifts
    10.7 Quantitative Analysis
    Problems
    11. Radiative Transitions and the Electron Microprobe
    11.1 Introduction
    11.2 Nomenclature in X-Ray Spectroscopy
    11.3 Dipole Selection Rules
    11.4 Electron Microprobe
    11.5 Transition Rate for Spontaneous Emission
    11.6 Transition Rate for Kα Emission in Ni
    11.7 Electron Microprobe:Quantitative Analysis
    11.8 Particle-Induced X-Ray Emission (PIXE)
    11.9 Evaluation of the Transition Probability for Radiative Transitions
    11.10 Calculation of the Kβ/Kα Ratio
    Problems
    12. Nonradiative Transitions and Auger Electron Spectroscopy
    12.1 Introduction
    12.2 Auger Transitions
    12.3 Yield of Auger Electrons and Fluorescence Yield
    12.4 Atomic Level Width and Lifetimes
    12.5 Auger Electron Spectroscopy
    12.6 Quantitative Analysis
    12.7 Auger Depth Profiles
    Problems
    13. Nuclear Techniques:Activation Analysis and Prompt Radiation Analysis
    13.1 Introduction
    13.2 Q Values and Kinetic Energies
    13.3 Radioactive Decay
    13.4 Radioactive Decay Law
    13.5 Radionuclide Production
    13.6 Activation Analysis
    13.7 Prompt Radiation Analysis
    Problems
    14. Scanning Probe Microscopy
    14.1 Introduction
    14.2 Scanning Tunneling Microscopy
    14.3 Atomic Force Microscopy
    Appendix 1. Km for 4He+ as Projectile and Integer Target Mass
    Appendix 2. Rutherford Scattering Cross Section of the Elements for 1 MeV4Hei
    Appendix 3. 4He+ Stopping Cross Sections
    Appendix 4. Electron Configurations and Ionization Potentials of Atoms
    Appendix 5. Atomic Scattering Factors
    Appendix 6. Electron Binding Energies
    Appendix 7. X-Ray Wavelengths (nm)
    Appendix 8. Mass Absorption Coefficient and Densities
    Appendix 9. KLL Auger Energies (eV)
    Appendix 10. Table of the Elements
    Appendix 11. Table of Fluoresence Yields for K,L,and M Shells
    Appendix 12. Physical Constants,Conversions,and Useful Combinations
    Appendix 13. Acronyms
    Index
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