本书涵盖了CMOS化学微传感系统的各个领域，详细论述了化学微传感器在CMOS中的集成技术。在做了简要介绍之后，阐述了所有必备的基础知识，介绍了各种化学敏感方法，并介绍了CMOS技术及其在微传感器中的应用，最后对未来的发展作出了展望。
本书内容丰富，涵盖了大量的基础知识及CMOS技术中化学微传感器的相关重要信息，适合希望从事此领域工作的学生、工程技术人员、科学家阅读，对于熟悉本领域的专家也很有参考价值。
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目录
- Preface
1 IntrodUCtion
2 Fundamentals of Chemical Sensing
3 Microtechology for Chemical Sensors
3.1 Microtechnology Substrate Materials
3.2 Fundamental Semiconductor Processing Steps
3.2.1 DeDosition
3.2.2 Patterning
3.2.3 Etching
3.2.4 Doping
3.3 CMOS TechIlOlogy
3.4 Microfabrication fOr Chemical Sensors
3.4.1 Micromachining for Chemical Microsensors
3.4.1.1 Bulk Micromachining
3.4.1.2 Sllrface Micromachining
3.4.2 Wafer BOilding
3.4.3 Sellsitive-Layer DepOSition
4 Microfabricated Chemical Sensors
4.1 Chemomechallical Sensors
4.1.1 Rayleigh SAW Devices
4.1.2 Flexural-P1ate-Wave or Lamb-Wave Devices
4.1.3 Resonating Cantilevers
4.2 Thermal Sensors
4.2.1 Catalvtic Thermal Seilsors(Pellistors)
4.2.2 Thermoelectric or Seebeck-Efiect Sensors
4.3 Optical Seilsors
4.3.1 InteKrated OptiCS
4.3.2 Microspectrometers
4.3.2.1 Fabry-Perot-TYPe StrllCtores
4.3.2.2 Grating-Type StrllCtllres
4.3.3 Biolumiilesceilt Bioreporter Integrated Circuits(BBIC)
4.3.4 Slitface Plasmoil Resoi
4.4 Electrochemical Sensors
4.4.1 VlOltammetric Sensors
4.4.2 P0tentiometric Sensors
4.4.2.1 Electrochemical Cell
4.4.2.2 Field-Effect-Based Devices
4.4.2.2.1 MOS Field-Effect Transistors,MOSFETs,and Ion-Selective Field-Effect Transistors.ISFETs Chemotransistors)
4.4.2.2.2 MOS Diode and Ion-Controlled Diode，ICD(Chemodiodes)
4.4.2.2.3 MOS Capacitor and Ion-Selective Capacitor(Chemocapacitors)
4.4.2.2.4 Measuring WOrk FUnctions：Kelvin Probe and Suspended-Gate Field-Effect Transistor,SGFET
4.4.2.2.5 Light-Addressable P0tentiometric Sensor,LAPS
4.4.2.2.6 Field-Effect Device Fabrication
4.4.3 Conductometric Sensors
4.4.3.1 Chemoresistors
4.4.3.1.1 Low-Temperature Chemoresistors
4.4.3.1.2 High-Temperature Chemoresistors (H0tplate Sensors)
4.4.3.2 Chemocapacitors
5 CMOS Platform Technology for Chemical Sensors
5.1 CMOS Capacitive Microsvstems
5.1.1 CMOS Capacitive Transducer
5.1.2 On-Chip Circuitrv of the Capacitive MicrosVstem
5.1.3 Capacitive Gas Sensing
5.1.3.1 Selectivitv Through Sensitive LaVer Thickness
5.1.3.2 Insensitivitv to L0w-(e)Analvtes
5.1.3.3 Humiditv Interflerence
5.2 CMOS Calorimetric Device
5.2.1 CMOS Calorimetric Transducer
5.2.2 Calorimeter Circuitrv
5.2.3 Calorimetric Gas Sensing
5.3 CMOS Integrated Resonant Cantilever
5.3.1 Resonant Cantilever Transducers
5.3.1.1 Thermal Actuation
5.3.1.2 Magnetic Actuation
5.3.1.3 Vibration Detection
5.3.1.4 Cantilevet Temperature
5.3.2 Microcantilever CirCUitrV
5.3.2.1 Thermal Actuation
5.3.2.2 MagIietic Actuatioil
5.3.3 Microcantilevers as Chemical Sensors
5.3.3.1 P0lymer C0ating
5.3.3.2 Ail&lvte Absorptioil
5.3.4 Comparison 0f C&iltilevers to Other Mass-Sensitive Devices
5.4 CMOS Microhotplate System Development
5.4.1 CMOS Microhotplates
5.4.1.1 TemDerature Sensor Calibratioil
5.4.1.2 Thermal Microhotplate M0deling and Characand aracterization
5.4.1.3 Microhotplate Heaters：Resistor and Transistor
5.4.1.4 Microhotplate Sensor Fabrication
5.4.2 Hotplate-Based CMOS MOIl01ithic Microsysteros
5.4.2.1 Anetlog H0tplate Microsystem
5.4.2.2 Analog/Digital Hotplate Microsystem
5.4.2.3 Digital H0tplate Array Microsystem
5.5 CMOS Chemical Multisensor Systeros
5.5.1 CMOS Multiparameter Biochemical Microsystem
5.5.2 CMOS Gas-Ph&se Multisensor System
5.5.2.1 Multisvstem Architecture
5.5.2.2 Multisvstem Circuitry Components，Design and Fabrication
5.5.2.3 Multisvstem Gas Sensor Measurements
5.5.2.4 Multisystem Application8&11d Operation Modes
5.6 CMOS Chemical Microsensor and System Packaging
5.6.1 Simple EpOXv-Based Package
5.6.2 Chip-on-Board Package
5.6.3 F1ip-Chip Package
6 Outlook and Euture Developments
References
Abbreviations
Index
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